The first domestically produced commercial electron beam lithography machine in the country was "born" in Hangzhou.

According to Hangzhou Daily, recently, as one of the first batch of signed incubation projects in the base, the first domestically produced commercial electron beam lithography machine "Xizhi" has entered application testing. Its accuracy is on par with mainstream international equipment, marking the development of quantum chip having a "Chinese cutting edge" from now on. At the testing site, the team related to the Quantum Research Institute of Zhejiang University in Yuhang was busy and tense. A machine that resembles a large steel cabinet is undergoing application testing, with real-time parameters constantly flashing on the electronic display. "This is not an ordinary machine, but a 'nanometer divine pen' that can carve out entire city maps on a hair!" The team leader told reporters that relying on the provincial key laboratory, this new generation 100kV electron beam lithography machine "Xizhi", independently developed by the institute, has officially entered the market.